Abstract: The paper presents a variant of realization and research of iterative division based on the Goldschmidt algorithm. Unlike the basic algorithm, no scaling of arguments is required, and all ...
Abstract: The etch bias indicating the differences of the pattern critical dimensions (CD) after developing inspection (ADI) and after etching inspection (AEI) are always measured and compensated to ...
Some results have been hidden because they may be inaccessible to you
Show inaccessible results